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Polygon scanner

Hyper scan scanner

고속으로 회전하는 Polygon 미러를 통해 2축 scanner 대비 10배 이상 빠른 속도로 laser beam을 주사할 수 있으며, ablation rate이 낮은 laser에 적용하여 공정 시간을 크게 단축시킬 수 있습니다.

Product Lincoln hyperSCAN Polygonal Scan Head
Highlights Designed for ultra-high-speed, dual-axis scanning on fixed targets
Wavelength Options 355 nm, 515 nm, 532 nm, 1030 nm, 1064 nm
Scan Rate 217 - 616 lines/s
Scan Speed (on target)¹ 70 - 200 m/s
Output Scan Angle² ±16° (Typical)
Input Clear Aperture 15 mm
f-theta Optics Focal Length 255 mm
Spot Size(M²=1.0) at 532nm³ 25 µm
Field Size 160 mm X 160 mm
Resolution, X Axis <3 μm
Resolution, Y Axis <3 μm
Repeatability, X axis⁴ ± 15  μm
Repeatability, Y axis⁴ ± 15  μm
X-Y Axes Galvanometers Yes
Start of Scan Sensor Yes
CDA Purge Port Yes
Control Card Included, with software interface
Input Power 24VDC 3A, 48VDC 6A (scan head); 12VDC 2A (controller)
Data Cable Length 5m (16.4 ft) max.
Laser Requirements Pulse on Demand (POD), Synchronization, Seed Frequency ≥ 50MHz
Operating Environment 25 °C ±10 °C ≤ 80% RH, non-condensing
Dimensions (excluding handles and scan lens) 10 in x 10.25 in x 10 in (254 mm x 260 mm x 254 mm)
Weight approx. 22 kg.
Datasheets
Notes 1) Calculated based on the scan rate and the use of an f-theta lens of 255 mm EFL
2) Larger scan angles available with reduced input beam size
3) Collimated input beam
4) Laser dependent

Polytek

Product Lincoln POLYtek™ Polygonal Scan Head Start of Scan Sensor Yes
Highlights Designed for ultra-high-speed, single-axis scanning on moving targets CDA Purge Port Yes
Wavelength Options 355 nm, 532 nm, 1064 nm, 10.6 μm Input Power 4 120 VAC, to controller
Scan Rate 150 – 800 lines/s (Standard)
0 – 1600 lines/s (Optional)
Control Card Included, with software interface
Scan Speed 1 48 – 256 m/s (Standard)
0 – 512 m/s (Optional)
Data Cable Length 25 ft. (7.62m) Max
Input Beam Size 15 mm (Max.) Y- Axis Galvanometer Optional
Line Placement Repeatability – Y Axis ±16 μrad Galvanometer Analog Communication ±10 V
Optimal Laser Pixel Placement Repeatability X Axis ±48 μrad Dimensions (excluding handles and scan lens) 10 in x 10.88 in x 11.43 in
(254 mm x 276 mm x 290 mm)
Output Scan Angle 3 ±16° (Typical) Datasheets
Operating Temperature 15 °C ±10 °C Notes 1) Calculated based on the scan rate and the use of an f-theta lens of 255 mm EFL
2) Larger scan angle with input beam diameter less than 15 mm
3) Requires ±15 VDC (7 Amps. Max), 5 VDC, and 24 VDC input power to the scan head

Polygon Component

Closed Loop Galvometer

Product 62xxH Series 83xxK Series
Highlights Efficiently-sized, reliable, cost-effective, and performance-optimized for most scanning applications. All the benefits of the 62xxH Series with even lower noise and drift for improved stability and resolution.
Apertures 3 - 50 mm 3 - 50 mm
Wavelength Options 355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 µm - 10.6 µm
Broadband Coatings: 350 nm – 12 um
Maximum Scan Angle 40°
Linearity 99.9% minimum, over 20°
99.5% typical, over 40°
Repeatability 8 µrad
Compatible Servo Drivers Analog Series:  671, 672, 673
Digital Series:  DC900, DC2000, DC3000 Plus
Datasheet
Notes: All angles are mechanical degrees, unless otherwise noted.

Moving Coil Galvometer

Highlights These galvanometer scanners have a high torque over extremely wide scan angles, with high accuracy and repeatability due to unique position detector design near mirror.

Open Loop Galvometer

Highlights Straight-forward and simple operation and control for applications requiring low speed and accuracy.

Resonant Scanner

Products CRS 4 KHz CRS 8 KHz CRS 12 KHz
Highlights Unique technology ideal for high-resolution imaging applications with fast frame rates.
Aperture 12 x 9.25 mm 7.2 x 5.0 mm ellipse 7.2 x 5.0 mm ellipse
Resonant Frequencys
(Hz, at 25°C)
3938 7910 12000
Maximum Scan Angle1 26° 26° 10°
Driver Board Driver board included
Datasheet
Notes: 1. All angles are in optical degrees, unless otherwise noted.

Analog Servo Drivers

Products 671 672 673
Highlights Performance PID servo drivers offered in compact, dual-axis and high power configurations.
Number of Axes Single Single Dual
Command Input
(Maximum)
+/- 10 volts
Output Stage Differential Single-Ended Differential
Power Supply Requirements +/- 15 to +/- 28VDC configurations available
Temperature Stability 20 ppm/°C
Built-in Protection Galvo Protection: Over-Temp/Over-Position
Servo Protection: Under-Voltage
Add-on Features High Power Option Digital Interface N/A N/A
Dimensions1
(Approximate, cm)
10.16 x 6.68 x 2.69 5.4 x 6.03 x 2.69 10.03 x 7.75 x 3.07
Datasheet
Notes: 1. Measurements include standard heatsink bracket.

Digital Servo Drivers

Products DC900 DC2000 DC3000 Plus
Highlights Self-calibrating, state-space servo drivers for applications demanding the highest speeds.
Number of Axes Single Dual Dual
Command Input Analog
XY2-100
High Speed Serial Digital
XY2-100
High Speed Serial Digital
XY2-100
High Speed Serial Digita
Power Supply Requirements +/-15 to +/-32 VDC configurations available +/-15 to +/-32 VDC configurations available +/-15 to +/-28 VDC configurations available
Max Drive Current 8 amps peak
5 amps rms
10 amps peak
2.5 amps rms (per axis)
20 amps peak
5 amps rms (per axis)
Quiescent Current 15W 16W 11.5W
ADither (RMS) 8 µrad-mech 7 µrad-mech 4 µrad-mech
Dimensions1
(Approximate, cm)
5.14 x 10.48 x 4.45 10.5 x 7.5 x 6.44 10.5 x 7.5 x 6.44
Datasheet
Notes: All angles are mechanical degrees, unless otherwise noted.
1. Dimensions include standard, single-module heatsink bracket. DC2000 is also available with split-module heatsink bracket.

Polygon Servo Drivers

Products BMC-3.4 Analog BMC-7 Analog BMC-30012 Digital
Highlights Compact and full-featured analog controller Full-featured analog controller with more power Digital Controller allows input via TTL or via Ethernet
Speed Range*s 620 to 55,000 RPM 620 to 55,000 RPM 0 to 30,000 RPM
Speed Stability* <0.01% <0.01% <0.03%
Max Continuous Motor Current 2.5 Amps 6.0 Amps 10.0 Amps
Encoder Capable Yes Yes Encoder is Required
Supply Voltage
(Min/Max)*
15V / 30V 15V / 60V 20V / 80V
Supply Current
(Max)*
4 Amps 9 Amps 15 Amps
Drive Type Current Current / Voltage Current
Motor @sync Signal Yes Yes Yes
Single Pulse per Rev Yes
(4 pole motor only)
Yes
(4 pole motor only)
Yes
(from encoder)
Notes: Scanner minimum speed can be lower for compatible scanner equipped with an encoder Scanner minimum speed can be lower for compatible scanner equipped with an encoder A scanner compatible with an encoder must be used

Precision Mirrors

Products Standard High-Performance
Highlights Adaptable and cost-effective silicon and fused-silica substrates supporting 3 - 50 mm aperture sizes. Highly-optimized beryllium substrates reduce inertia while maintaining stiffness for applications where speed is a premium. Available in 7 - 50 mm aperture sizes.
Coatings Performance coatings available in a full range from 355 nm to 10.6 um. Broadband coatings with good overall reflectivity complement wavelength specific coatings with extremely high reflectivity.
Mounting Options In-house mounting options available to optimize performance, serviceability, and cost.
Datasheets

Polygon Mirrors

Highlights Diamond-turned and conventionally-polished polygon mirrors constructed from 6061-T6 aluminum; regular, irregular, monogon, and pyramidal geometries; flatness to 1/8 ƛ; surface roughness 20Å - 80Årms; facet count 1-128; inscribed diameters up to 12 in.; scan angles 5 -70°
Coatings Gold, NiChrome, Aluminum, and various dielectric quarter wave stacks (wavelengths 350 – 10,600 nm)
Resource Polygonal Mirrors Design Guide
Datasheets